Selected Papers on Resolution Enhancement Techniques in Optical Lithography Franklin Schellenberg

ISBN: 9780819451668

Published: April 13th 2004

Hardcover

875 pages


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Selected Papers on Resolution Enhancement Techniques in Optical Lithography  by  Franklin Schellenberg

Selected Papers on Resolution Enhancement Techniques in Optical Lithography by Franklin Schellenberg
April 13th 2004 | Hardcover | PDF, EPUB, FB2, DjVu, talking book, mp3, RTF | 875 pages | ISBN: 9780819451668 | 6.74 Mb

Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have become routine in manufacturing. This volume gathers together seminal RET papers.



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